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The Chemistry of the Semiconductor Industry

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This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.

Author

S. J. Moss & A. Ledwith

Format

Ebook

ISBN

9780216920057

Language

English

Pages

308

Publication Date

02-26-1989

Publisher

Springer

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